ATTO3-RG High Vacuum Resistance Thermal Evaporation Coating Machine & Glove Box

ATTO3- RG is a proven, robust and versatile design standard solution. The system can be operated manually and automatically, with a wide range of deposition instrument options, including: RF and DC sputtering sources, low temperature organic evaporators and metal evaporators. There are also many system options available, such as quartz crystal monitoring, high vacuum load lock and heating, cooling, rotating or static sample stage.



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ATTO3-RG High Vacuum Resistance Thermal Evaporation Coating Machine & Glove Box

Features:

Chamber 304L stainless steel or glass chamber: Φ300mm × 400mm high (internal dimensions)

The room comes standard with up to five spare ports based on system configuration

Vacuum test runs to 10 -8 Torr

Thermal evaporation (up to 2 independent metal evaporation boats)

Magnetron sputtering source (up to 2,  2 ", 3" sources)

Organic deposition sources (up to two)

The above configurations can be installed in combination.

Custom configurations available on request

Technical Parameter: 

Chamber

Description

Material: stainless steel 1.4301 (SUS type 304), thickness 3 mm

Size: 1200mm (L) x 750mm (W) x 900mm (H)

     47.2(L) x29.5” (W)x35.4”(H)

Volume 

0.8 m³

Front window

Panel: 8 mm thick safety tempered glass or 10 mm thick polycarbonate (optional)

Size: 1123mm (L) x 839mm (H); 44.2”(L)x33”(H)

Glove port

Hard aluminum alloy or acetal material (optional)

Caliber 220 mm, O-ring seal

Glove

Material: Butyl rubber

Thickness: 0.4 mm or 0.8mm (optional)

Filter

Outlet and inlet filters, filtration

Illuminatio

LED lighting at the top of the front window

Leak rate 

Leak detection is carried out in accordance with the oxygen method and pressure change method in ISO 10648-2: 1994 / EJ / T 1096-1999 "Sealed Boxes-Part 2: Sealing Classification and Related Inspection Methods", Final acceptance test shall be carried out according to the standard of tightness

GP20 gas purification system

Description

Automatic removal of H2O and O2

Single purification column system, automatic regeneration (optional GP200 double purification column)

Closed gas circulation pipeline

Use voltage

AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional)

Working gas

Working gas: N2, Ar, He (purity ≥99.999%)

Regeneration gas: H2 accounts for 5% -10%, and the rest is working gas (purity ≥99.999%)

Vacuum pump

Specifications: Rotary vane vacuum pump, with oil mist filter, with gas ballast control

Flow: 12 m³ / h (7 cfm), dual substrates, vacuum

Circulation unit

Oil-free high-speed fan

Air volume80 m³/h

Valve

KF40 High vacuum valve

Leak rate

Leak detection is carried out in accordance with the oxygen method and pressure change method in ISO 10648-2: 1994 / EJ / T 1096-1999 "Sealed Boxes-Part 2: Sealing Classification and Related Inspection Methods" The final acceptance test is performed according to the standard of Class 1 tightness

Control cabinet size

600mmLx 800mmDx 870mmH; 23.6”Lx 31.5”Dx 34.3”mmH

Antechamber

Main antichamber


Material

stainless steel type 304 (1.4301), thickness 3 mm

Size

φ360mmx600mm(L) ;  φ142"x236"(L)  or  φ390mmx600mm(L)(optional)

Vacuum degree

-2 mbar

Mini antichamber

Material

stainless steel type 304 (1.4301), thickness 2 mm

Sizeφ150mm x 330mm(L); φ59" x 130"(L);

Vacuum degree

-2 mbar

Cleaing system

Description

After setting the corresponding time and pressure, the system can automatically perform gas replacement on the chamber.

Analyzer

Oxygen analyzer

Size

205 mmLx 80 mmWx 60 mmH; 8” mmLx 3.1” mmWx 2.4” mmH

Measuring range

0-1000 ppm

Other oxygen analyzers

GE oxy.IQ™ Oxygen Transmitter

Moisture Analyzer

Size

205 mmLx 80 mmWx 60 mmH; 8” mmLx 3.1” mmWx 2.4” mmH

Measuring range

0-500 ppm

Other water analyzers

GE VeriDri™ Dew-Point Transmitter

Solvent purification system

Description  

Material: stainless steel 1.4301 (SUS type 304), thickness 3 mm

Internal size: 220mm (Φ) x 450mm (H);87"(Φ) x 177" (H)

High-quality activated carbon

Optional equipment

Freezer

Independent control system, integrated on the side panel of the cabinet, temperature -35 ℃, optional volume 18L or 32L

Main body 304 stainless steel plate, 5 layers of variable compartments

R404 environmentally friendly refrigerant, imported

Heating chamber

Large transition configuration heating system, temperature is 200 ℃, temperature control ± 1 ℃

Vacuum coating room

Description

Glass bell cover +304 stainless steel vacuum chamber base

size: Φ300×H400mm

Volumn

0.03m³

Vacuum system

Description

"Molecular pump + mechanical pump" high vacuum system:

Molecular pump

Pumping speed: 1200L / S, a true quasi-oil-free vacuum system, which uses down pumping to avoid the pumping weakness of the molecular pump and improve the pumping speed. The molecular pump is guaranteed for 5 years and provides direct replacement service for damage.

  * Optional imported molecular pump

Vacuum pump

Specifications: Rotary vane vacuum pump, with oil mist filter, with gas ballast control

Flow: 36 m³ / h (21 cfm), double substrate, vacuum degree 10-3  mbar or dry pump (optional)

* Optional dry vacuum pump

Operating Voltage

AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (Optional)

Pumping speed

Pumped from the atmosphere 9×10-4Pa≤30min(Exposed to the atmosphere for a short period of time, and then evacuated after flushing with dry nitrogen)

Valve

Fore valve / bypass valve: GDQ-40 high vacuum pneumatic baffle valve;

Vacuum measurement

"Two lows and one high" (two resistance gauges measure low vacuum, one ionization gauge measures high vacuum) Digital composite vacuum gauge, measuring range from 1 ×105 Pa to 1 ×10-5 Pa; it can be displayed and controlled by PC, which can be realized Interlocking operation.

* Optional imported wide-range vacuum transmitter

Vacuum measurement

Partially adopts metal seal and partly adopt fluorine rubber ring seal;

Coating source

Metal evaporation source


Structure

Using organic sublimation beam source furnace, each steaming material can be installed with 5CC, there is a heat blocking plate on the top to prevent the heat of the evaporation boat from radiating upwards, and an anti-temperature interference device is provided between the evaporation sources (easy to access, easy to clean and maintain).

Evaporation temperature

Room temperature 0 ~ 1300 ℃

Metal evaporation power

Output Power

0 ~ 3000W, the current is regulated by inverter, which is stable and reliable. The power of the power supply is continuously adjustable from 0 to the maximum power.

Control

RS-485 interface, power supply is continuously adjustable from 0 to maximum power.

Number

2 sets, automatic switching control

Control System

Description

It adopts windows operating platform and cotrl2000 control system, and adopts IPC + network technology to realize parameter setting of the main components of the whole machine, implement real-time monitoring and intelligent fault diagnosis, and fully automatic monitoring of film thickness. There are two modes of automatic and manual control. Except for taking and putting samples, all other operations are controlled by software on the PC;