ATTO3-SR Stainless Steel High Vacuum Organic Evaporation Coating

ATTO3-SR is a proven, robust and versatile design standard solution. The system can be operated manually and automatically, with a wide range of deposition instrument options, including: RF and DC sputtering sources, low temperature organic evaporators and metal evaporators. There are also many system options available, such as quartz crystal monitoring, high vacuum load lock and heating, cooling, rotating or static sample stage.

Request Quote

Qty

Add to wishlist Add to compare

FREE:888-999-6186
CALL:541-666-2111

Description Advantage

ATTO3-SR Stainless Steel High Vacuum Organic Evaporation Coating

Box 304L stainless steel or glass chamber: Φ300mm × 415mm high (internal dimensions)

The room comes standard with up to five spare ports based on system configuration

Vacuum test runs to 10 -8 Torr

Thermal evaporation (up to 2 independent metal evaporation boats)

Magnetron sputtering source (up to 2, 2 ", 3" sources)

Organic deposition sources (up to two)

The above configurations can be installed in combination.

Custom configurations available on request

Glass bell jar vacuum chamber, the most intuitive observation of evaporation state and film deposition phenomenon;

Compound molecular pump and direct-connected rotary vane pump, large pumping speed, quasi-oil-free vacuum system (molecular pump pumping speed ≥400L / S);

Two sets of water-cooled evaporation electrodes, which can work stably for a long time, compatible with the design of evaporation sources of metal materials and organic materials;

Professional vacuum evaporation power supply, digital display working current and voltage, constant current output;

Can be coated with 110mm square substrate or 25 ~ 25mm ITO / FTO glass, and can be customized with integrated high-precision etching mask;

The substrate can choose heating or water cooling, the source base distance is ≥300mm;

Can choose substrate rotation;

Good film uniformity and repeatability, online monitoring and control of evaporation rate and film thickness;

Can deposit metals (Au, Ag, Al, Ca, Cu, Mg, Fe, Cr, Ni, etc.), non-metals, compounds (MoO3, LiF, etc.) and organic materials, can expand the deposition of single-layer films, multilayer films and mixed Film

The equipment has high integration, compact structure and small footprint (0.92 square meters); the equipment is equipped with casters for easy movement and positioning.

Technical Parameter:

Vacuum coating room
Description		Glass bell cover +304 stainless steel vacuum chamber base Size: Φ300 × H415mm;
Volume		0.03m³
Vacuum system
Description		"Molecular pump + mechanical pump" high vacuum system:
Molecular pump		Pumping speed: 1200L / S, a true quasi-oil-free vacuum system, which uses down pumping to avoid the pumping weakness of the molecular pump and improve the pumping speed. The molecular pump is guaranteed for 5 years and provides direct replacement service for damage. * Optional imported molecular pump
Vacuum pump		Specifications: Rotary vane vacuum pump, with oil mist filter, with gas ballast control Flow: 36 m³ / h (21 cfm), double substrate, vacuum degree * Optional dry vacuum pump
Operating voltage		AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional)
Pumping speed		Draw from the atmosphere to 9 × 10-4Pa≤30min (expose the atmosphere for a short time, start to evacuate after rushing into dry nitrogen)
Valve		Fore valve / bypass valve: GDQ-40 high vacuum pneumatic baffle valve;
Vacuum measurement		"Two lows and one high" (two resistance gauges measure low vacuum, one ionization gauge measures high vacuum) Digital composite vacuum gauge, measuring range from 1×105Pa to 1×10-5Pa; it can be displayed and controlled by PC, which can be realized Interlocking operation. * Optional imported wide-range vacuum transmitter
Vacuum measurement		Partially adopts metal seal and partly adopt fluorine rubber ring seal;
Substrate stage
Description		The sample table is made of 304 stainless steel, the substrate is placed directly above the evaporation source (full automatic lifting function), and the tooling is designed according to the size of the substrate to facilitate the user to fix the sample. Customizable high-precision etching mask plate;
Spin		The stepping motor is used to control the rotation, the magnetic fluid is sealed, the motor and the magnetic fluid are coaxial, and there will be no loss of rotation or crawling. The stepper motor is accurately controlled and the speed range is continuously adjustable from 0-30rpm;
Lift		Adopt stepper motor to control rotation, magnetic fluid seal, precise control, height range 0-100mm continuously adjustable;
Mask		Drawer-type structure, carrying the largest sample less than 120 × 120mm, equipped with Japanese SMC pneumatic substrate baffle, electric linkage automatic control.
Coating source
Organic evaporation source	Structure	Water-cooled copper electrode + evaporation boat structure, anti-pollution partitions are installed between evaporation sources, and each source is equipped with positioning baffle, intelligent PC control;
	Evaporation temperature	Room temperature 0 ~ 1300 ℃
	Control	RS-485 interface, the power of the power is continuously adjustable between 0-max power.
	Number	2 sets
Control system
Description		It adopts windows operating platform and cotrl2000 control system, and adopts IPC + network technology to realize parameter setting of the main components of the whole machine, implement real-time monitoring and intelligent fault diagnosis, and fully automatic monitoring of film thickness. There are two modes of automatic and manual control. Except for taking and putting samples, all other operations are controlled by software on the PC; it provides friendly human-machine operating interfaces such as vacuum system, process settings, and gas filling and deflation systems; on the industrial computer, parameters can be set through the recipe to achieve the process and process of the program. Setting, storage and printing of equipment parameters.
Features		Can effectively solve the coating accuracy, stability and reliability. Complete program interlocking, complete design and protection against misoperation; system alarms for abnormal conditions such as water shortage, over-current and over-voltage, and corresponding protection measures are implemented. It adopts rich I / O interface design to fully meet the functional requirements of expansion and external devices. The display controls the door opening / closing of the coating machine. Coating process, process, film thickness, convenient and save printing.
Film thickness monitoring and control system
Description		A quartz crystal film thickness controller is used, and a water-cooled film thickness probe is installed near the substrate table, and an industrial computer is connected. The film thickness meter is used to monitor the coating rate and final thickness in real time, and the accuracy can reach ± 1A (0.1nm). The real-time information is fed back to the industrial computer. If the coating thickness reaches the set thickness, the power can be automatically controlled, and the coating can be stopped to achieve the purpose of automatic film thickness control.
Range		Monitoring thickness range: 1Å ~ 99µ9999Å, resolution 1Å; Monitoring rate range: 0.1Å ~ 9999.9Å.S / s, resolution 0.1Å
Specification		The coating process, process and film thickness settings are all on the PC, which can realize automatic control of the entire process. The coating process can be set on the PC and data can be recorded.
Cooling system
Description		The cooling water circuit is 8 inlets and 8 outlets, and the total water inlet is controlled by a hydraulic relay. The total inlet and outlet water is connected to a 1P refrigeration cycle water machine, and the temperature control range is 10-25 ℃. Provide stable refrigerated circulating water to targets, metal sources, molecular pumps, and magnetic fluids to ensure stable operation of the equipment.
Cooling system		The cooling water circuit is 8 inlets and 8 outlets, and the total water inlet is controlled by a hydraulic relay. The total inlet and outlet water is connected to a 1P refrigeration cycle water machine, and the temperature control range is 10-25 ℃. Provide stable refrigerated circulating water to metal sources, molecular pumps, and magnetic fluids to ensure stable equipment operation.
Other instructions
Product Certification		ISO9001 certification、CE certification、UL certification
Application considerations		Please refer to the danger, warning, caution, etc.

ABOUT US

Nichwell has over 10 years experience manufacturing inert glove box solutions for clean environments. Our core market segments include university, OLED research and mass production, lithium ion battery research and production, inert gas welding, pharmaceutical, nuclear containment and research in chemistry applications.

When you select Nichwell Solutions as your technology provider, you'll be placing your IT infrastructure in the hands of experienced, trained professionals. We take a different approach and the results are clear. People love our team and the services we provide.
	Knowledgeable Experts. A certified staff of technicians and engineers. We lower your support costs by correctly diagnosing and fixing issues the first time and by providing effective preventive maintenance to help you avoid expensive downtime and repairs. Our 100% Nicehwell-based team consists of experienced, seasoned professionals certified by Microsoft, Citrix, Dell, VMWare, Veeam and CompTIA. We are your IT department.
Custom-Built Solutions Dedicated account representative and support system for your organization Our sales team is not influenced by commissions, manufacturer incentives or quotas because that's not how we do business. We explore your operations, carefully evaluate your security, establish your monitoring and technology needs, then provide a tailored proposal. Because our only interest is a satisfied long term client, you can be sure we're on your side and our solutions will always revolve around you.
	No Outsourcing Every service is owned, managed and backed by our in-house professionals. When you purchase a re-sold service and then that service has a problem, response and resolution times can suffer. That's why we host our own servers in carrier-class, US-based data centers and we don't resell 3rd party hosted services to our clients. We're control freaks. Say goodbye to delays, excuses, finger pointing and blame-games. If we offer it, we support it. It's as simple as that.
Honest Pricing Relationships are more important than a quick buck Nichwell Solutions has a high client retention rate. This is partly because people love our team, but it's also because we take the time to assess your needs and propose affordable solutions that grow as you grow. Our clients view us as a partner, not a vendor. We help you reach your goals, we help you understand and leverage technology, and we believe in the benefits of building lasting relationships.
	Client Service The key to our client service is our seamless integration of deep industry and functional expertise with tools and capabilities to support execution and make change happen—on a global scale.

ATTO3-SR Stainless Steel High Vacuum Organic Evaporation Coating

Why Choose Us

The Nichwell Solutions advantage.

When you select Nichwell Solutions as your technology provider, you'll be placing your IT infrastructure in the hands of experienced, trained professionals. We take a different approach and the results are clear. People love our team and the services we provide.

Knowledgeable Experts.

A certified staff of technicians and engineers.

Custom-Built Solutions

Dedicated account representative and support system for your organization

No Outsourcing

Every service is owned, managed and backed by our in-house professionals.

Honest Pricing

Relationships are more important than a quick buck

Client Service

ATTO3-SR Stainless Steel High Vacuum Organic Evaporation Coating

ABOUT US

CONTACT US

TWITTER

FACEBOOK

2018