Panel: 8 mm thick safety tempered glass or 10 mm thick polycarbonate (optional)

Size: 1123mm (L) x 839mm (H); 44.2”(L)x33”(H)

Hard aluminum alloy or acetal material (optional)

Caliber 220 mm, O-ring seal

Material: Butyl rubber

Thickness: 0.4 mm or 0.8mm (optional)

Outlet and inlet filters, filtration

LED lighting at the top of the front window

Leak detection is carried out in accordance with the oxygen method and pressure change method in ISO 10648-2: 1994 / EJ / T 1096-1999 "Sealed Boxes-Part 2: Sealing Classification and Related Inspection Methods", Final acceptance test shall be carried out according to the standard of tightness

Automatic removal of H2O and O2

Single purification column system, automatic regeneration (optional GP200 double purification column)

Closed gas circulation pipeline

AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional)

Working gas: N2, Ar, He (purity ≥99.999%)

Regeneration gas: H2 accounts for 5% -10%, and the rest is working gas (purity ≥99.999%)

Specifications: Rotary vane vacuum pump, with oil mist filter, with gas ballast control

Flow: 12 m³ / h (7 cfm), dual substrates, vacuum

Oil-free high-speed fan

Air volume：80 m³/h

KF40 High vacuum valve

Leak detection is carried out in accordance with the oxygen method and pressure change method in ISO 10648-2: 1994 / EJ / T 1096-1999 "Sealed Boxes-Part 2: Sealing Classification and Related Inspection Methods" The final acceptance test is performed according to the standard of Class 1 tightness

600mm（L） x 800mm（D） x 870mm（H）; 23.6”（L） x 31.5”（D） x 34.3”mm（H）

stainless steel type 304 (1.4301), thickness 3 mm

φ360mmx600mm(L) ;  φ142"x236"(L)  or  φ390mmx600mm(L)(optional)

-2 mbar

stainless steel type 304 (1.4301), thickness 2 mm

-2 mbar

After setting the corresponding time and pressure, the system can automatically perform gas replacement on the chamber.

205 mm（L） x 80 mm（W） x 60 mm（H）; 8” mm（L） x 3.1” mm（W） x 2.4” mm（H）

0-1000 ppm

GE oxy.IQ™ Oxygen Transmitter

205 mm（L） x 80 mm（W） x 60 mm（H）; 8” mm（L） x 3.1” mm（W） x 2.4” mm（H）

0-500 ppm

GE VeriDri™ Dew-Point Transmitter

Material: stainless steel 1.4301 (SUS type 304), thickness 3 mm

Internal size: 220mm (Φ) x 450mm (H);87"(Φ) x 177" (H)

High-quality activated carbon

Independent control system, integrated on the side panel of the cabinet, temperature -35 ℃, optional volume 18L or 32L

Main body 304 stainless steel plate, 5 layers of variable compartments

R404 environmentally friendly refrigerant, imported

Large transition configuration heating system, temperature is 200 ℃, temperature control ± 1 ℃

"Molecular pump + mechanical pump" high vacuum system:

Pumping speed: 1200L / S, a true quasi-oil-free vacuum system, which uses down pumping to avoid the pumping weakness of the molecular pump and improve the pumping speed. The molecular pump is guaranteed for 5 years and provides direct replacement service for damage.

  * Optional imported molecular pump

Specifications: Rotary vane vacuum pump, with oil mist filter, with gas ballast control

Flow: 36 m³ / h (21 cfm), double substrate, vacuum degree 10^-3  mbar or dry pump (optional)

* Optional dry vacuum pump

AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (Optional)

Pumped from the atmosphere 9×10^-4Pa≤30min(Exposed to the atmosphere for a short period of time, and then evacuated after flushing with dry nitrogen)

Fore valve / bypass valve: GDQ-40 high vacuum pneumatic baffle valve;

"Two lows and one high" (two resistance gauges measure low vacuum, one ionization gauge measures high vacuum) Digital composite vacuum gauge, measuring range from 1 ×10⁵ Pa to 1 ×10^-5 Pa; it can be displayed and controlled by PC, which can be realized Interlocking operation.

* Optional imported wide-range vacuum transmitter

Partially adopts metal seal and partly adopt fluorine rubber ring seal;

Using organic sublimation beam source furnace, each steaming material can be installed with 5CC, there is a heat blocking plate on the top to prevent the heat of the evaporation boat from radiating upwards, and an anti-temperature interference device is provided between the evaporation sources (easy to access, easy to clean and maintain).

0 ~ 3000W, the current is regulated by inverter, which is stable and reliable. The power of the power supply is continuously adjustable from 0 to the maximum power.

2 sets, automatic switching control

It adopts windows operating platform and cotrl2000 control system, and adopts IPC + network technology to realize parameter setting of the main components of the whole machine, implement real-time monitoring and intelligent fault diagnosis, and fully automatic monitoring of film thickness. There are two modes of automatic and manual control. Except for taking and putting samples, all other operations are controlled by software on the PC;