Vacuum coating is a technique for producing thin film materials. The atoms of the material in the vacuum chamber are separated from the heating source and hit the surface of the object to be plated.

However, the prerequisite for vacuum coating is to ensure that the vacuum chamber has a good and stable vacuum. At present, the sealing form of vacuum coating equipment mostly adopts a single rubber ring seal. This sealing form is suitable for the sealing of a smaller sealing surface. For larger sealing surfaces, the sealing method is prone to poor sealing effect.

Provide a safe and reliable vacuum coating equipment. This system is integrated by a vacuum coating system and a glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber and sample samples in a glove box with high purity inert gas atmosphere Storage, preparation and testing of samples after evaporation.

The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete system with a controllable environment atmosphere, eliminating the organic large-area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.