During the manufacturing process of the OLED display panel, a vacuum vapor deposition of the organic film layer is required on the glass substrate, which requires the completion of the vacuum vapor deposition machine. Therefore, a glove box is provided, and the system is integrated by a vacuum coating system and a vacuum glove box system, and the film vapor deposition can be completed in a high vacuum vapor deposition chamber, and a high purity inert gas atmosphere in a glove box. The sample was carried out, prepared, and the detection of the vapor deposition sample.

Vacuum coating system advantages: Evaporation coating and glove box combination, realization of process full enclosure of vapor deposition, package, test, so that the entire film growth and device preparation process is highly integrated into a complete controlled environmental atmosphere, eliminate organic big Influence of unstable factors in the atmospheric environment during the preparation of area circuits, guarantees high performance, large-scale organic optoelectronic components and circuitry.

The vacuum coating system is mainly used in the experimental study and application of perovskite, OLED and PLED, semiconductor preparation.

Magnectic distribution is one of physical vapor deposition. The general distribution method can be used to prepare multi-material such as metal, semiconductor, insulator, and have the advantages of simple equipment, easy to control, large coating area and strong attachment, and magnetron sputtering in the 1970s It is achieved high speed, low temperature, low damage. Since it is high-speed sputtering under low gas pressure, the allation rate of the gas must be effectively improved. Magnetron sputtering is introduced into a magnetic field on the target cathode surface to increase the plasma density to increase the sputtering ratio by increasing constraints of the charged particles in the target cathode surface.

However, existing sputter coating devices have some defects during use, for example, the coating is not uniform, and no vacuum operation is used, and there is a case where the bubble or the coating is unstable after the film is plated, resulting in a low pass rate of the coating. 

A sputtering coating apparatus capable of maintaining a vacuum is integrated by a vacuum coating system and a glove box system, and a film vapor deposition can be completed in a high vacuum vapor deposition chamber, and a high purity inert gas atmosphere in a glove box. The sample was carried out, prepared, and the detection of the vapor deposition sample.

Multifunctional magnetron sputtering coating system Main use: For the preparation of various metal films, semiconductor films, dielectric films, magnetron membranes, optical membranes, hyperinca film, sensing films, and various special needs.

Vacuum coating technology first appeared in the 1930s, industrial applications began to appear in the 1940s and 1950s, and large-scale industrial production began in the 1980s. It has been widely used in industries such as electronics, aerospace, packaging, decoration, and hot stamping. Vacuum coating refers to the deposition of a certain metal or metal compound on the surface of a material (usually a non-metallic material) in the form of a gas phase in a vacuum environment, which is a physical vapor deposition process. Because the coating is often a metal film, it is also called vacuum metallization. In a broad sense, vacuum coating also includes vacuum deposition of non-metallic functional films such as polymers on the surface of metal or non-metal materials. Among all the materials to be plated, plastic is the most common, followed by paper coating. Compared with metals, ceramics, wood and other materials, plastics have the advantages of sufficient sources, easy control of performance, and convenient processing. Therefore, a wide variety of plastics or other polymer materials are used as engineering decorative structural materials and are widely used in automobiles, home appliances, and daily use. Packaging, craft decoration and other industrial fields. However, most plastic materials have defects such as low surface hardness, insufficient appearance, and low wear resistance. For example, a very thin metal film is deposited on the surface of the plastic to give the plastic a bright metallic appearance. A suitable metal source is also It can greatly increase the wear resistance of the surface of the material, and greatly broaden the decoration and application scope of the plastic.

Vacuum coating equipment mainly refers to a type of coating that needs to be carried out under a relatively high degree of vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is divided into evaporation and sputtering.

Etelux's glove box evaporation integrated machine is composed of a vacuum coating system and a glove box system. It can complete film evaporation in a high vacuum evaporation chamber, and store samples in a glove box with high purity inert gas atmosphere. Preparation and testing of samples after evaporation.

Equipment use

It is mainly used in experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation, etc.

Advantage

The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, encapsulation, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large-area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.

The functions of vacuum coating are multifaceted, which also determines that its applications are very rich. In general, the main functions of vacuum coating include imparting a high degree of metallic luster and mirror effect to the surface of the plated parts, making the film have excellent barrier properties on the film material, and providing excellent electromagnetic shielding and conductive effects.

In order to improve the competitiveness of photovoltaic products, one of the most effective ways is to increase the conversion efficiency of solar cells. In addition to improving the conversion efficiency of the cell itself through various technical means, considerable progress has also been made in improving the light transmittance and weather resistance of its packaging material-photovoltaic glass. The current mainstream technical solution is to coat the surface of the photovoltaic glass with an anti-reflection film, that is, use the sol-gel method to coat one or more layers of thin-film materials on the surface of the photovoltaic glass to reduce the reflection in a specific band of the spectrum, thereby improving the photovoltaic glass transmittance. The methods of coating the glass surface include roll coating, spraying, and surface etching, among which roll coating is the most widely used because of its convenient implementation.

However, all current technical methods cannot solve the problem of uniformity of the coating film. During the spray coating process, the coating solution in the center of the spray gun is more enriched, causing mottling; the surface etching method is difficult to uniformize the surface composition of the embossed glass, resulting in inconsistent etching reaction speeds and uneven film thickness;

Glovebox evaporation all-in-one machine. This system is integrated by the vacuum coating system and the glove box system, which can complete the film evaporation in the high vacuum evaporation chamber, and store and prepare the samples under the glove box high purity inert gas atmosphere and the detection of samples after evaporation. It is mainly used in experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation, etc.

The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, encapsulation, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large-area circuit preparation process. The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.

Vacuum coating is a technique for producing thin film materials. The atoms of the material in the vacuum chamber are separated from the heating source and hit the surface of the object to be plated.

However, the prerequisite for vacuum coating is to ensure that the vacuum chamber has a good and stable vacuum. At present, the sealing form of vacuum coating equipment mostly adopts a single rubber ring seal. This sealing form is suitable for the sealing of a smaller sealing surface. For larger sealing surfaces, the sealing method is prone to poor sealing effect.

Provide a safe and reliable vacuum coating equipment. This system is integrated by a vacuum coating system and a glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber and sample samples in a glove box with high purity inert gas atmosphere Storage, preparation and testing of samples after evaporation.

The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete system with a controllable environment atmosphere, eliminating the organic large-area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.

The coating machine is widely used. The coating machine mainly uses the characteristics of high bonding force between aluminum molecules and the plated material in a vacuum state, and is an equipment that guarantees the process of attaching the plated material to the coating. This equipment has high efficiency, high speed, stability and reliability. , High cost performance. Most of the existing vacuum coating machines use the drum coating method. The main drum in the cavity is set directly above the evaporation source. The main drum is easily contaminated during the operation. The main drum is surrounded by rollers, which is difficult to clean and accumulates the deposited aluminum for a long time. Film will reduce the surface finish of the main drum. Contamination and cleaning will damage the main drum, and eventually cause scratches on the coil, which will affect product quality. In addition, the drum coating method before the coil enters the main drum, it is not easy to fully develop This situation will lead to empty lines and wrinkles after evaporation, which not only affects product quality, but also causes material waste.

In order to overcome the above-mentioned shortcomings of the prior art, a glovebox vapor deposition integrated machine is provided. This system is integrated by a vacuum coating system and a glove box system. The thin film vapor deposition can be completed in a high vacuum vapor deposition chamber. The storage and preparation of samples and the detection of samples after vapor deposition are carried out under high purity inert gas atmosphere.

The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete system with a controllable environment atmosphere, eliminating the organic large-area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.

The vacuum coating machine consists of a vacuum coating chamber, evaporation source, vacuum unit, fixture, evaporation power supply, control system and auxiliary devices.

Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many other types. The main idea is divided into evaporation and sputtering.

Main features of vacuum coating machine:

1. Equipped with quartz crystal or optical film thickness control instrument, which can realize automatic control of film thickness and coating and realize high-precision coating effect.

2. Equipped with RF ion bombardment device to purify the surface of the substrate, make the film and the surface of the substrate better adhesion, and improve the strength of the film.

3. It can vapor-deposit two or more different vapor-deposition materials at the same time, and can be made into composite film.

4. Easy to operate, ideal for production and scientific research.

5. It has the functions of over current, over voltage protection, water cut, under voltage protection and electrical interlock.

High-vacuumcoating machine, coating machine is currently a wide range of equipment for producing vacuum conditions. Its related components and components: mechanical pump, booster pump, oil diffusion pump, condensate pump, vacuum measurement system.

 Vacuum glove box Vacuum evaporation glove box (referred to as vapor deposition for short) is a glove box technology that has developed early in PVD professional skills and is widely used in technology. Although sputter plating and ion plating developed later have advantages over vapor deposition in many aspects, vacuum transpiration professional skills still have many advantages, such as the relative simplicity of special equipment and processing technology, which can plate very pure The film layer, which can be prepared with a special structure and properties, is still a very important glove box professional skill nowadays. In recent years, because of the extensive application of electronic bombardment transpiration, high-frequency induction transpiration and laser transpiration in the professional skills of transpiration glove boxes, this professional skill has become more and more perfect.

  Place the film in the vacuum glove box and use the evaporation source to heat it to evaporate. When the average free path of the evaporated molecules is greater than the linear scale of the vacuum glove box, the vapor atoms and molecules escape from the surface of the evaporation source. Blocked by the impact of other molecules or atoms, it can directly reach the surface of the coated substrate. Because the substrate temperature is low, it will condense on it and form a film. In order to improve the adhesion of the evaporated molecules to the substrate, the substrate is subjected to Appropriate heating is required. In order to make the evaporation glove box run smoothly, it should have the vacuum conditions in the evaporation process and the evaporation conditions in the film production process.

  Vacuum conditions during evaporation: When the average free path of the vapor molecules in the vacuum glove box is greater than the distance between the evaporation source and the substrate (called the evaporation distance), sufficient vacuum conditions will be obtained. Therefore, it is necessary to increase the average free path of the remaining gas, thereby reducing the collision probability of the vapor molecules and the remaining gas molecules, and pumping the vacuum glove box into a high vacuum.

  The vacuum degree in the vacuum glove box process is not as high as possible, because when the vacuum in the vacuum glove box exceeds 10-6Pa, it is necessary to bake the vacuum system to achieve degassing. Because the degassing of baking will form the pollution of the substrate, the film can be produced under high vacuum of 10-5Pa without degassing by baking, and the quality of the film is not necessarily better than that of the film prepared under ultra high vacuum. Poor quality is worth noting. Therefore, in the vacuum transpiration glove box equipment, the vacuum degree selected in the glove box room should generally be higher than 10-2Pa and lower than 10-5Pa.

 The glove box sealing effect is good: the entire glove box sealing operation box is transparent plexiglass, the glove box sealing box is clear at a glance, and the viewing angle is wide and there is no dead angle. Its structure is simple, easy to use, can transmit ultraviolet light, and is light in weight.

 Under normal conditions, its shape is stable, highly transparent, resistant to chemical corrosion and climate change. The glove box sealed box is equipped with a porous power socket, which is convenient for scientific experiments. Thick latex gloves are used for operation gloves. The sealing is reliable and durable.

The glove box sealing device has novel design, reliable sealing and easy opening. The glove box has good sealing performance, and can shield and absorb alpha rays and low-energy beta rays emitted by radioactive materials to protect human tissues from damage by ionizing radiation. Optional accessories for glove box: water content analyzer, oxygen content analyzer, automatic control system, heating temperature control system, vacuum pump, etc.