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ATTO3-O High Vacuum Glass Bell Cover Organic Evaporation Coating Machine
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ATTO3-O High Vacuum Glass Bell Cover Organic Evaporation Coating Machine
Features:
Box 304L stainless steel or glass chamber: Φ300mm × 415mm high (internal dimensions)
The room comes standard with up to five spare ports based on system configuration
Vacuum test runs to 10 -8 Torr
Thermal evaporation (up to 2 independent metal evaporation boats)
Magnetron sputtering source (up to 2 2 ", 3" sources)
Organic deposition sources (up to two)
The above configurations can be installed in combination.
Custom configurations available on request
Technical Parameter:
| Chamber | ||
|---|---|---|
| Description | Material: Stainless steel 1.4301 (SUS type 304), thickness 3 mm Dimensions: 472"(L) x 295" (W) x354" (H);1200mm (L) x 750mm (W) x 900mm (H) | |
| Volume | 0.8 m³ | |
| Front window | Panel: 8 mm thick safety tempered glass or 10 mm thick polycarbonate (optional) Dimensions: 442"(L)x330"(H) or 1123mm (L) x 839mm (H) | |
Glove port | Hard aluminum alloy material or polyoxymethylene material (optional) Caliber 86.6"(220 mm), O-ring seal | |
Glove | Material: Butyl rubber Thickness: 0.4 mm or 0.8mm (available for selection) | |
| Filter | Outlet and inlet filters, filtering | |
| Illumination | LED lighting is located on the top of the front window | |
| Leak rate | The leak detection is based on the oxygen method and the pressure change method in the ISO 10648-2: 1994 / EJ / T 1096-1999 "Sealed Box Room-Part 2: Sealing Classification and Related Inspection Methods", Carry out the final acceptance test according to the standard of first-class tightness | |
| GP20 gas purification system | ||
| Description | Automatic removal of H2O and O2 Single purification column system, automatic regeneration (optional GP200 double purification column) Closed gas circulation line | |
| Use voltage | AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional) | |
| Working gas | Working gas: N2, Ar, He (purity ≥99.999%) Regeneration gas: H2 accounts for 5% -10%, and the rest is working gas (purity ≥99.999%) | |
| Vacuum pump | Specifications: Rotary vane vacuum pump, equipped with oil mist filter, with gas ballast control Flow rate: 12 m³ / h (7 cfm), double substrate, vacuum degree | |
| Circulation unit | Oil-free high-speed fan Air volume: 80 m³ / h | |
| Valve | KF40 high vacuum valve | |
| Leak rate | The leak detection is based on the oxygen method and the pressure change method in the ISO 10648-2: 1994 / EJ / T 1096-1999 "Sealed Box Room-Part 2: Sealing Classification and Related Inspection Methods" Carry out the final acceptance test according to the standard of level 1 tightness | |
| Control cabinet size | 236"(L)x315"(D)x342"(H); 600mm（L） x 800mm（D） x 870mm（H） | |
Antechamber | ||
Main Antechamber | Material | Stainless steel type 304 (1.4301), thickness 3 mm |
| Size | φ360mmx600mm(L) (φ142"x236"(L))or φ390mmx600mm(L)(φ153"x236"(L))(optional) | |
Vacuum degree | -2 mbar | |
Mini antechamber | Material | Stainless steel type 304 (1.4301), thickness 2 mm |
| Size | φ150mm x 330mm(L)(φ59" x 130"(L)) | |
Vacuum degree | -2 mbar | |
| Cleaning system | ||
| Description | Set the corresponding time and pressure, the system can automatically replace the gas box. | |
Analyzer | ||
Oxygen Analyzer | Size | 205 mm（L） x 80 mm（W） x 60 mm（H）; 81"（L） x 31"（W） x 24"（H） |
Measuring range | 0-1000 ppm | |
Other oxygen analyzers | GE oxy.IQ™ Oxygen Transmitter | |
Moisture Analyzer | Size | 205 mm（L） x 80 mm（W） x 60 mm（H） |
Measuring range | 0-500 ppm | |
Other water analyzers | GE VeriDri™ Dew-Point Transmitter | |
Solvent purification system | ||
Description | Material: Stainless steel 1.4301 (SUS type 304), thickness 3 mm Internal dimensions: 220mm (Φ) x 450mm (H)(87"(Φ) x 177" (H)) Premium activated carbon | |
Optional equipment | ||
Independent control system, integrated on the side panel of the cabinet, temperature -35 ℃, volume 18L or 32L optional Main body 304 stainless steel plate, 5 layers of variable compartment R404 environmentally friendly refrigerant, imported | ||
| Heating cabin | Main antechamber configuration heating system, the temperature is 200 ℃, temperature control ± 1 ℃ | |
Vacuum coating room | ||
|---|---|---|
| Description | Glass bell jar +304 stainless steel vacuum chamber base Size: Φ300 × H415mm( Φ118" × H163"); | |
| Volumn | 0.03m³ | |
| Vacuum system | ||
| Description | Using "molecular pump + mechanical pump" high vacuum system: | |
| Molecular pump | Pumping speed: 1200L / S, a true quasi-oil-free vacuum system, using down-pumping to avoid the pumping weakness of the molecular pump and improve the pumping speed; the molecular pump is guaranteed for 5 years and provides direct replacement service for damage. * Optional imported molecular pum | |
| Vacuum pump | Specifications: Rotary vane vacuum pump, equipped with oil mist filter, with gas ballast control Flow rate: 36 m³ / h (21 cfm), double substrate, vacuum * Optional dry vacuum pump | |
| Operating Voltage | AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional) | |
| Pumping speed | Pumping from the atmosphere to 9×10-4Pa≤30 min (exposure to the atmosphere for a short time, flushing with dry nitrogen and starting pumping) | |
| Valve | Front stage valve / bypass valve: GDQ-40 high vacuum pneumatic baffle valve; | |
| Vacuum measurement | "Two lows and one high" (two resistance gauges measure low vacuum, one ionization gauge measures high vacuum) Digital display compound vacuum gauge, measuring range from 1×105 Pa to 1×10-5 Pa; displayed and controlled by PC, can be realized Operation interlocking linkage. * Optional imported wide range vacuum transmitter | |
| Vacuum measurement | Part adopts metal seal, part adopts fluorine rubber ring seal; | |
Coating source | ||
Metal evaporation source | Structure | Using water-cooled copper electrode + evaporation boat structure, there are anti-pollution partitions between the evaporation sources and each source is equipped with a positioning baffle, intelligent PC control; |
| Evaporation temperature | Room temperature 0 ~ 1300 ℃ | |
Metal evaporation power supply | Output Power | 0 ~ 3000W, the current is regulated by inverter, which is stable and reliable. The power of the power supply is continuously adjustable from 0 to the maximum power. |
| Control | RS-485 interface, power supply is continuously adjustable from 0 to maximum power. | |
Number | 2 sets, automatic switching control | |
| Control system | ||
| Description | Adopt windows operating platform and cotrl2000 control system, and adopt IPC + network technology to realize parameter setting of main components of the whole machine, implement real-time monitoring and intelligent diagnosis of faults, and automatic monitoring of film thickness. There are two modes of automatic and manual control. In addition to taking and placing samples, all other operating processes are controlled by software on the PC; provide a friendly man-machine interface such as vacuum system, process setting, gas filling and degassing system; parameters can be set on the industrial computer through the recipe to realize the process and process Setting, storage and printing of equipment parameters. | |
| Features | It can effectively solve the accuracy, stability and reliability of the coating. Perfect program interlocking, complete anti-misoperation design and protection; system abnormalities such as water shortage, over-current and over-pressure alarm and corresponding protection measures are implemented. It adopts rich I / O interface design to fully meet the functional requirements of expansion and external devices. The display controls the door opening / closing of the coating machine. Coating process, procedure, film thickness, convenient and save printing. | |
Film thickness monitoring and control system | ||
| Description | A quartz crystal film thickness controller is used, a water-cooled film thickness probe is installed near the substrate table, and the industrial computer is connected. The film thickness meter is used to monitor the coating rate and final thickness in real time, and the accuracy can reach ± 1A (0.1nm). Real-time information is fed back to the industrial control machine. If the coating thickness reaches the set thickness, the power can be automatically controlled to stop the coating to achieve the purpose of automatic control of the film thickness . | |
| Range | Monitoring thickness range: 1Å ～ 99µ9999Å, resolution 1Å; monitoring rate range: 0.1Å ～ 9999.9Å.S / s, resolution 0.1Å | |
Feature | The coating process, process, and film thickness are all set on the PC, which can realize automatic control of the whole process. The coating process can be set on the PC and the data can be recorded. | |
Cooling system | ||
| Cooling system | The cooling water path is 8 in and 8 out, and the total water intake is controlled by a water pressure relay. The total inlet water and outlet water are connected with 1P refrigeration circulating water machine, and the temperature control range is 10-25 ℃. Provide stable cooling and circulating water to the metal source, molecular pump and magnetic fluid to ensure the stable operation of the equipment. | |
| Other instructions | ||
| Product certification | ISO9001 certification, CE certification, UL certification | |
| Application considerations | For details, please refer to the instruction manual for danger, warning, caution, etc. | |
