Magnetron Sputtering Coating Machine with Buffer Chamber

Robust and versatile design standard solution. The system can be operated manually and automatically, with a wide range of deposition instrument options, including: RF and DC sputtering sources, low temperature organic evaporators and metal evaporators. There are also many system options available, such as quartz crystal monitoring, high vacuum load lock and heating, cooling, rotating or static sample stage.



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Magnetron Sputtering Coating Machine with Buffer Chamber


Magnetron Sputtering Coating Machine with Buffer Chamber


Item 

Unit

Number

Specification

Vacuum chamber

Sputtering vacuum chamber

set

1

・ 560*H300

Sampling chamber 

set

1

・ 250*H500

Plug valve

piece

1

DN100

1

DN150

Molecular 

piece

1

1200L/s

1

llOL/s

Mechanical pump

set

1

TRP-36

1

TRP-12

Baffle valve

piece

2

GDQ40

Solenoid stop valve

piece

2

SJIR-S6G01

Lighting and baking device

set

1


Flange and observation 

window of each model

batch

1

DN16\35\63\100\150

Stainless steel pipeline 

and pipe joint

batch

1


Ultra high vacuum flapper valve

piece

1

DN150

Solenoid valve

piece

2

DN35

other valves 

batch

1


Vacuum 

measurement 

Digital composite vacuum meter

set

1

PDF-5227B

Bare metal gauge

batch

1

ZJ52T\ZJ27 an so on 

Gas transportation

Mass flowmeter

set

1

D08-2B

Mass flowmeter controller

set

2

D07-7BM

Pipeline and joint

batch

1


Solenoid valve

piece

5

SJIR-S6G01

Gas filter

piece

2


Control interface

set