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SQC-310 Thin Film Deposition Controller
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SQC-310 Thin Film Deposition Controller
Bright color LCD display-available in English
Standard RS-232 and USB (optional RS-232 and Ethernet)
Features Quick Setup menu, 6 context-sensitive buttons, and a simple parameter setting knob for easy setup and operation
Windows® programs for developing, testing, and downloading processes, and Windows programs for recording instrument data to a PC for process analysis and quality control
Precise process control, especially for low deposition rates, with a measurement rate of 10 readings per second and a measurement resolution of ± 0.03 Hz
Storage capacity up to 100 processes, 1000 layers of film, 50 types of film materials
Monitor source materials with single or multiple sensors, providing accurate source distribution monitoring
Technical parameter
Digital input / relay
| Type | SQC-310 | SQC-310C |
|---|---|---|
| Measurement | ||
| QCM input | 2 (4 optional) | 4 |
| Measurement frequency range | Adjustable: 1.0 MHz minimum 6.5 MHz maximum | Adjustable: 1.0 MHz minimum 6.5 MHz maximum |
| Frequency resolution (1) | ± 0.012 Hz | ± 0.012 Hz |
| Thickness and rate resolution / measurement (2) | ±0.015 Å | ±0.015 Å |
| Frequency stability | ± 2 ppm total, 0 to 50C | ± 2 ppm total, 0 to 50C |
| Measurement cycle | 0.10 to 1.0 s (adjustable) | 0.10 to 1.0 s (adjustable) |
| Rate display | 0.01 Å/sec | 0.01 Å/sec |
| Control | ||
| Storage | 100 processes, 1000 layers, 50 films | 100 processes, 1000 layers, 50 films |
| Control output | 2 (4 optional) | 4 |
| Output singal | ± 0 to 10 VDC, 15 bits | ± 0 to 10 VDC, 15 bits |
| 8/8 (16/16 optional) | 16/16 | |
| Digital input | 5 VDC non-isolated | 5 VDC non-isolated |
| Relay | SPST Form 1A, 30V, 2A max | SPST Form 1A, 30V, 2A max |
| Interface | Standard RS-232 and USB (RS-232 and Ethernet optional) | Standard RS-232 and USB (RS-232 and Ethernet optional) |
| Remote power control | Optional (IPN 782-900-017) | Optional (IPN 782-900-017) |
| Monitor | ||
| Ty | 1/4 VGA 320 x 240 active matrix color LCD | 1/4 VGA 320 x 240 active matrix color LCD |
| Chart | Rate, deviation, power or full screen numeric | Rate, deviation, power or full screen numeric |
| General | ||
| Power | 100-240 VAC, 50/60 Hz, 25W | 100-240 VAC, 50/60 Hz, 25 W |
| Compliance | CE, RoHS | CE, RoHS |
| Windows® software | Included | Included |
| Housing / installation | 5 1/4” half-rack | 5 1/4” half-rack |
(1) Resolution of 0.25 second measurement interval
(2) Tool / density = 100 / 1, base frequency = 6 Hz, 0.25 second measurement interval
